Growth of epitaxial CoSi2 on Si (001)

被引：0
|
作者：
Falke, M [1 ]
Gebhardt, B [1 ]
Teichert, S [1 ]
Beddies, G [1 ]
Hinneberg, HJ [1 ]
机构：
[1] TU CHEMNITZ ZWICKAU,INST PHYS,D-09107 CHEMNITZ,GERMANY
来源：
EUROPEAN JOURNAL OF CELL BIOLOGY | 1997年 / 74卷
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D O I：
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中图分类号：
Q2 [细胞生物学];
学科分类号：
071009 ; 090102 ;
摘要：
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页码：114 / 114
页数：1
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