Multiple-Wavelength Vertical-Cavity Surface-Emitting Lasers by Grading a Spacer Layer for Short-Reach Wavelength Division Multiplexing Applications

被引：8

作者：

Dayal, Padullaparthi Babu ^{[1
]}

Sakaguchi, Takahiro ^{[1
]}

Matsutani, Akihiro ^{[1
]}

Koyama, Fumio ^{[1
]}

机构：

[1] Tokyo Inst Technol, Microsyst Res Ctr, Precis & Intelligence Lab, Midori Ku, Yokohama, Kanagawa 2268503, Japan

来源：

APPLIED PHYSICS EXPRESS | 2009年 / 2卷 / 09期

关键词：

VCSEL ARRAY; MULTIWAVELENGTH; OXIDATION; SPAN;

D O I：

10.1143/APEX.2.092501

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We propose and demonstrate a simple and unique method to fabricate the multiple-wavelength vertical-cavity surface-emitting lasers (VCSELs) emitting at 980 nm by grading only the first low-index spacer layer of SiO(2)/Ta(2)O(5) dielectric mirror. A multi step exposure to UV lithography followed by selective wet chemical etching has been applied to create spacer layer gradients. We have successfully realized equally spaced four-channel VCSELs with wavelength span exceeding 30.0 nm by grading a 230.0 nm spacer layer and achieved single mode lasing with a side mode suppression ratio in excess of 30.0 dB. (C) 2009 The Japan Society of Applied Physics

引用

页数：3

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