Reflection of keV-energy electrons from multilayer surfaces

被引：7
|
作者：
Afanas'ev, VP
Lubenchenko, AV
Fedorovich, SD
Pavolotskii, AB
机构：
[1] Tech Univ, Moscow Power Inst, Moscow 111250, Russia
[2] Moscow MV Lomonosov State Univ, Nucl Phys Res Inst, Moscow 119899, Russia
来源：
TECHNICAL PHYSICS | 2002年 / 47卷 / 11期
关键词：
D O I：
10.1134/1.1522115
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The energy spectra of electrons reflected from multilayer targets are studied theoretically and experimentally. A self-consistent theory of electron reflection from multilayer surfaces is constructed. Simple analytical models of electron reflection that illustrate the feasibility of the depth profiling of multilayer targets are presented. The energy spectra of electrons normally incident on Nb/Si and Nb/Al/Nb/Si targets and reflected from them at an angle of 45degrees to the normal are taken. A method for the depth profiling of such structures is elaborated. (C) 2002 MAIK "Nauka/Interperiodica".
引用
收藏
页码：1444 / 1452
页数：9
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