Recent advances in optical MEMS devices and systems

被引：1
|
作者：
Patterson, PR [1 ]
Hah, D [1 ]
Lee, MMC [1 ]
Tsai, JC [1 ]
Wu, MC [1 ]
机构：
[1] Univ Calif Los Angeles, Dept Elect Engn, Los Angeles, CA 90095 USA
来源：
PHOTONIC DEVICES AND ALGORITHMS FOR COMPUTING IV | 2002年 / 4788卷
关键词：
angular vertical combdirve; micromirrors; MEMS; NEMS; optical scanner; optical switch; photonic crystal; photonic bandgap; SOI-MEMS; SUMMiT-V; WDM;
D O I：
10.1117/12.453712
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We have developed novel optical micro-electro-mechanical systems, (MEMS) and nano-electro-mechanical, (NEMS) optical components for applications including imaging, switching, and optical integrated circuits. This paper provides an overview of current optical MEMS/NEMS research projects in our integrated photonics laboratory at UCLA. Three optical MEMS/NEMS devices: a large, 1 mm diameter, scanning micromirror for imaging applications, an analog micromirror array for network switching applications, and a nanoscale photonic crystal switch for integrated photonic circuit applications will be described.
引用
收藏
页码：1 / 8
页数：8
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