Research on skill knowledge and process simulation-based Virtual MEMS Manufacturing System

被引：0

作者：

Sun, Guang-Yi ^{[1
]}

Zhao, Xin ^{[1
]}

Lu, Gui-Zhang ^{[1
]}

机构：

[1] Inst Robot & Instrumentat Automat Syst, Tianjin 300071, Peoples R China

来源：

2006 CHINESE CONTROL CONFERENCE, VOLS 1-5 | 2006年

关键词：

MEMS; process simulation; virtual manufacturing; lithography;

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper puts forward the concept of Virtual MEMS Manufacturing System based on skill knowledge and process simulation. Concretely, using optical lithography as the breakthrough, this paper details a virtual lithography prototyping system and key problems. In addition, the alignment simulation example of fabricating micro-acceleration indicates the feasibility of system.

引用

页码：415 / +

页数：2