Near-Field Sounding of Multilayered Media

被引:0
|
作者
Gaikovich, Peter K. [1 ]
机构
[1] RAS, Inst Phys Microstruct, Nizhnii Novgorod, Russia
关键词
near-field sounding; multilayered structures; dielectric;
D O I
暂无
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
A method of the coherent near-field sounding of layers' parameters of a multilayered dielectric is proposed. It is based on the field measurements with the use of subwavelength probes (emitting and receiving) that are spaced above the upper layer of the studied structure. It makes possible to achieve a subwavelength resolution at the control of the layers' depth. The developed approach can be used, for instance, for the monitoring of epitaxy of multilayered heterostructures using SNOM techniques.
引用
收藏
页码:333 / 336
页数:4
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