Preparation and characterization of TiN-Ag nanocomposite films

被引：39
|
作者：
de los Arcos, T
Oelhafen, P
Aebi, U
Hefti, A
Düggelin, M
Mathys, D
Guggenheim, R
机构：
[1] Univ Basel, Inst Phys, CH-4056 Basel, Switzerland
[2] Univ Basel, ME Muller Inst, Biozentrum, CH-4056 Basel, Switzerland
[3] Univ Basel, SEM Lab, Pharmazentrum, CH-4056 Basel, Switzerland
来源：
VACUUM | 2002年 / 67卷 / 3-4期
关键词：
magnetron co-sputtering; TiN films; nanocomposite films; Ag clusters;
D O I：
10.1016/S0042-207X(02)00232-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Thin nanostructured films of TiN-Ag are deposited by a plasma vapour process consisting of co-sputtering of Ti and Ag from three magnetrons in an Ar-N-2 gas mixture. The coatings are characterized by in situ photoelectron spectroscopy, energy-filtered transmission electron microscopy and scanning electron microscopy. The dependence of the film structure and silver cluster distribution on total silver content, substrate biasing and substrate temperature was investigated. (C) 2002 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码：463 / 470
页数：8
相关论文
共 50 条
  • [1] Fabrication and characterization of TiN-Ag nano-dice
    Kitawaki, Ko.
    Kaneko, K.
    Inoke, K.
    Hernandez-Garrido, J. C.
    Midgley, P. A.
    Okuyama, H.
    Uda, M.
    Sakka, Y.
    MICRON, 2009, 40 (03) : 308 - 312
  • [2] Characterization and mechanical properties investigation of TiN-Ag films onto Ti-6Al-4V
    Du, Dongxing
    Liu, Daoxin
    Zhang, Xiaohua
    Tang, Jingang
    Xiang, Dinggen
    APPLIED SURFACE SCIENCE, 2016, 365 : 47 - 56
  • [3] A comparative antibacterial activity and cytocompatibility for different top layers of TiN, Ag or TiN-Ag on nanoscale TiN/Ag multilayers
    Zhao, Mengli
    Gong, Huanhuan
    Ma, Ming
    Dong, Lei
    Huang, Meidong
    Wan, Rongxin
    Gu, Hanqing
    Kang, Yuanbin
    Li, Dejun
    APPLIED SURFACE SCIENCE, 2019, 473 : 334 - 342
  • [4] Microstructure, mechanical and tribological properties of TiN-Ag films deposited by reactive magnetron sputtering
    Ju, Hongbo
    Yu, Lihua
    Yu, Dian
    Asempah, Isaac
    Xu, Junhua
    VACUUM, 2017, 141 : 82 - 88
  • [5] Preparation and characterization of Ag/polyaniline nanocomposite
    Li, Zhihua
    Li, Junjie
    Lin, Wei
    Zhongnan Daxue Xuebao (Ziran Kexue Ban)/Journal of Central South University (Science and Technology), 2014, 45 (06): : 1784 - 1789
  • [6] Preparation and characterization of nanocomposite films
    Carotenuto, G
    Nicolais, L
    ADVANCED COMPOSITES LETTERS, 1996, 5 (03) : 87 - 90
  • [7] Preparation and characterization of PVA/nanocellulose/Ag nanocomposite films for antimicrobial food packaging
    Sarwar, Muhammad Salman
    Niazi, Muhammad Bilal Khan
    Jahan, Zaib
    Ahmad, Tahir
    Hussain, Arshad
    CARBOHYDRATE POLYMERS, 2018, 184 : 453 - 464
  • [8] Antimicrobial TiN-Ag Coatings in Leather Insole for Diabetic Foot
    Marques, Sandra M.
    Carvalho, Isabel
    Leite, Teofilo R.
    Henriques, Mariana
    Carvalho, Sandra
    MATERIALS, 2022, 15 (06)
  • [9] Detection of tubulointerstitial nephritis antigen (TIN-ag) in Lewis rat
    Nelson, TR
    Butkowski, RJ
    Michael, AF
    Charonis, AS
    CONNECTIVE TISSUE RESEARCH, 1997, 36 (03) : 223 - 229
  • [10] Thermal stabilization of nanocrystalline promoting conductive corrosion resistance of TiN-Ag films for metal bipolar plates
    Yan, Fangyuan
    Jiang, Bailing
    Wang, Ziyu
    Shi, Jing
    Yang, Chao
    Dong, Dan
    Wang, Xu
    VACUUM, 2022, 195
12345