Design and Implementation of a Micromanipulation System Using a Magnetically Levitated MEMS Robot

Magnetic levitation of microrobots is presented as a new technology for micromanipulation tasks. The microrobots were fabricated based on microelectromechanical systems technology and weigh less than I g. The robots can be positioned in 3-D using magnetic field. It is shown that microrobots can be produced using commercially available magnets or electrodeposited magnetic films. A photothermal microgripper is integrated to the microrobots to perform micromanipulation operations. The microgrippers; can be actuated remotely by laser focusing that makes the microrobot free of any. wiring. This leads to increased motion range with more functionality in addition to dust-free motion-and ability to work in closed environments. The 3-D motion capability of the microrobots is verified experimentally and it was demonstrated that the microgrippers can be operated in a vertical range of 4 mm and a horizonal range of 4 mm x 5 mm. Micromampulation experiments such as pick-and-place, pushing, and pulling were demonstrated using objects with 100 mu m and 1 mm diameter.