Integrated power transistor in 0.18-μm CMOS technology for RF system-on-chip applications

被引:13
|
作者
Hsu, HM [1 ]
Su, JG
Chen, CW
Tang, DD
Chen, CH
Sun, JYC
机构
[1] Natl Taiwan Univ, Dept Elect Engn, Taipei 106, Taiwan
[2] Taiwan Semicond Mfg Co, Res Dev Ctr, Hsinchu 300, Taiwan
关键词
0.18-mu m CMOS; RF power MOS transistor; system-on-chip (SoC);
D O I
10.1109/TMTT.2002.805289
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A novel design and performance of a power MOS transistor for RF system-on-chip applications are reported. The power MOS transistor with high breakdown voltage is integrated into 0.18-mum CMOS technology with only one additional mask. By an optimized design considering all aspects of dc and RF performances, a power MOS transistor with 16-GHz cutoff frequency and 24-GHz maximum oscillation frequency has been demonstrated. In addition, the power gain is 12 dB at 2.4 GHz with power-added efficiency of 50%. In this study, the device architectures that include drain engineering, substrate engineering, and gate scaling are investigated comprehensively.
引用
收藏
页码:2873 / 2881
页数:9
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