On the body-thickness dependence of the linearly extrapolated threshold voltage of a double-gate metal-oxide-semiconductor field-effect device

被引:3
|
作者
Wong, Man [1 ]
Shi, Xuejie [1 ]
Chow, Thomas [1 ]
机构
[1] Hong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Kowloon, Hong Kong, Peoples R China
关键词
threshold voltage; double-gate; field-effect transistor; silicon body thickness;
D O I
10.1143/JJAP.45.9069
中图分类号
O59 [应用物理学];
学科分类号
摘要
An approximate but simple expression explicitly relating the surface potential to the surface electric field of a symmetrical double-gate metal-oxide-semiconductor field-effect device is used to derive a compact expression for. the linearly, extrapolated threshold voltage V-Te of such a device with a uniformly doped channel region. The expression is shown to be valid for both partially and fully depleted devices. V-Te is predicted to exhibit a global minimum as the thickness of the channel is systematically increased.
引用
收藏
页码:9069 / 9071
页数:3
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