Electrical characterization of Schottky diodes based on boron doped homoepitaxial diamond films by conducting probe atomic force microscopy

被引:14
|
作者
Alvarez, J.
Houze, F.
Kleider, J. P.
Liao, M. Y.
Koide, Y.
机构
[1] Univ Paris 06, Ecole Super Elect, UMR 8507 CNRS, Lab Genie Elect Paris, F-91192 Gif Sur Yvette, France
[2] Univ Paris 11, Ecole Super Elect, UMR 8507 CNRS, Lab Genie Elect Paris, F-91192 Gif Sur Yvette, France
[3] Natl Inst Mat Sci, Adv Mat Lab, Tsukuba, Ibaraki 3050044, Japan
关键词
conductive probe atomic force microscope; local resistance; tungsten carbide Schottky diode; p-type diamond;
D O I
10.1016/j.spmi.2006.07.027
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
A large planar tungsten carbide (WC) Schottky diode on p-type homoepitaxial diamond was mainly investigated on a microscopic level by atomic force microscopy (AFM) and conducting probe atomic force microscopy (CP-AFM), allowing simultaneous topographic and local electrical resistance imaging measurements. These techniques revealed the existence of a specific microstructure on the WC Schottky contact consisting of electrically insulating islands surrounded by conductive paths. The islands are found to be insulating in the whole range of explored bias [-5 V, +5 V], whereas the current flowing between the islands is 1000 times lower at a reverse bias of -5 V than at a forward bias of +5 V, in agreement with the rectifying ratio found from macroscopic current-voltage (I-V) measurements. CP-AFM provides a prospective imaging tool which is well suited for analyzing the local electrical properties and instabilities of Schottky junctions. (c) 2006 Elsevier Ltd. All rights reserved.
引用
收藏
页码:343 / 349
页数:7
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