Broadband antireflection coatings deposited by magnetron sputtering

被引:0
|
作者
Wang, ML
Gong, H
Fan, ZX
机构
[1] Optical Coating Center, Shanghai Inst. Optic and Fine Mach., Chinese Academy of Sciences
来源
CHINESE SCIENCE BULLETIN | 1997年 / 42卷 / 19期
关键词
magnetron sputtering; broadband antireflection; deposition;
D O I
10.1007/BF02882569
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
[No abstract available]
引用
收藏
页码:1612 / 1615
页数:4
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