SU-8 Micromachining of Millimeter and Submillimeter Waveguide Circuits

被引：15

作者：

Smith, Charlie H., III ^{[1
]}

Sklavonuos, Angelique ^{[1
]}

Barker, N. Scott ^{[1
]}

机构：

[1] Univ Virginia, CL Brown Dept ECE, Charlottesville, VA 22904 USA

来源：

2009 IEEE/MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM, VOLS 1-3 | 2009年

关键词：

D O I：

10.1109/MWSYM.2009.5165858

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Micromachined WR 3.4 waveguide circuits are fabricated using a SU-8 micromachining process. In order to demonstrate the viability and repeatability of this process both straight waveguide sections and cylindrical cavity resonators are fabricated and measured. The SU-8 waveguide compares reasonably well to a standard WR 3.4 waveguide section. The measured cavity resonators demonstrate quality factors of 1900 and 2200 at a resonant frequency of 308 GHz.

引用

页码：961 / 964

页数：4

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