Interfacial Behavior of Flux Residues and Its Impact on Copper/Underfill Adhesion in Microelectronic Packaging

被引:10
|
作者
Andre, John S. [1 ]
Ulrich, Nathan [1 ]
Ji, Karen [2 ]
Chen, Zhan [1 ]
机构
[1] Univ Michigan, Dept Chem, 930 N Univ Ave, Ann Arbor, MI 48109 USA
[2] Univ Chicago, Dept Chem, 5735 S Ellis Ave, Chicago, IL 60637 USA
关键词
PROBING MOLECULAR-STRUCTURES; OXIDE THIN-FILMS; VIBRATIONAL SPECTROSCOPY; UNDERFILL MATERIALS; POLYMER SURFACES; GENERATION; COPPER; SUBSTRATE;
D O I
10.1115/1.4047338
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In the micro-electronics industry, flux treatment on copper is an important procedure to ensure maximum adhesion to copper. In this research, sum frequency generation (SFG) vibrational spectroscopy has been applied to investigate molecular behavior of flux molecules at buried copper and underfill (UF) interfaces in situ. SFG is a second-order nonlinear optical spectroscopic technique, which can provide molecular structural information of surfaces and interfaces with a submonolayer interface specificity. Two model fluxes, adipic acid and phenylacetic acid, and a commercial no-clean flux were examined. Without washing or heating the surface of flux-treated copper, the buried interfaces between copper (treated with flux) and UF are dominated by ordered epoxy in UF. Washing or heating the surface of flux-treated copper leads to disordered copper/UF interfaces, greatly increasing the adhesion. The buried interfacial structures obtained from SFG results are well correlated to the adhesion strengths measured using the lap shear testing method. This research demonstrates the importance of the washing or heating steps of substrate surfaces to increase the interfacial adhesion.
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页数:8
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