Diamond graphitization by laser-writing for all-carbon detector applications

被引:25
|
作者
De Feudis, M. [1 ,2 ]
Caricato, A. P. [1 ,2 ]
Taurino, A. [3 ]
Ossi, P. M. [4 ]
Castiglioni, C. [5 ]
Brambilla, L. [5 ]
Maruccio, G. [6 ]
Monteduro, A. G. [6 ]
Broitman, E. [7 ]
Chiodini, G. [2 ]
Martino, M. [1 ,2 ]
机构
[1] Univ Salento, Dept Math & Phys, I-73100 Lecce, Italy
[2] INFN Natl Inst Nucl Phys, I-73100 Lecce, Italy
[3] CNR IMM Inst Microelect & Microsyst, I-73100 Lecce, Italy
[4] Politecn Milan, Dipartimento Energia, I-20133 Milan, Italy
[5] Politecn Milan, Dipartimento Chim, Mat, Ingn Chim, I-20133 Milan, Italy
[6] NNL CNR Nanotec, I-73100 Lecce, Italy
[7] Linkoping Univ, IFM, SE-58183 Linkoping, Sweden
关键词
Diamond film; Graphitization; Surface characterization; Ohmic contacts; All-carbon detectors; SINGLE-CRYSTAL DIAMOND; RAMAN-SPECTROSCOPY; ELECTRODES; GRAPHITE; MODULUS; ORIGIN;
D O I
10.1016/j.diamond.2016.12.019
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The surface of a detector grade CVD polycrystalline diamond sample (5 x 5 x 0.05 mm(3)) was irradiated by an ArF excimer laser (lambda = 193 nm, T = 20 ns) to produce graphitic conductive layers. In particular, two sets of four parallel graphitic strip-like contacts, with 1 mm pitch, were created along the whole sample on the top and on the rear surfaces of the sample respectively. The two series of stripes lie normally to each other. Such a grid allows to obtain a segmented all-carbon device capable of giving bi-dimensional information on particle detection processes in nuclear applications. Afterwards, an extensive characterization of the samples was performed: SEM and micro-Raman investigations to study the morphological and structural evolution of the irradiated areas, EDS measurements to individuate any absorption phenomena from environment associated to laser treatment, and nanoindentation mapping to understand how the hard-soft transformation occurred depending on the locally transferred energy. Finally, current-voltage analyses were carried out checking the ohmic behavior of the diamond-graphite contact. By comparing the results of the different characterization analyses, a strong periodidty of the modified surface properties was found, confirming the reliability and reproducibility of the laser-induced graphitization process. The results demonstrate that the laser-writing technique is a good and fast solution to produce graphitic contacts on diamond surface and therefore represents a promising way to fabricate segmented all-carbon devices. (C) 2016 Elsevier B.V. All rights reserved.
引用
收藏
页码:25 / 33
页数:9
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