Growth control of single and multi-walled carbon nanotubes by thin film catalyst

被引:0
|
作者
Yoon, YJ
Bae, JC
Baik, HK
Cho, S
Lee, SJ
Song, KM
Myung, NS
机构
[1] Yonsei Univ, Dept Engn Met, Seodaemun Ku, Seoul 120749, South Korea
[2] Kyungsung Univ, Dept Phys, Pusan 608736, South Korea
[3] Kyungsung Univ, Dept Mat Sci & Engn, Pusan 608736, South Korea
[4] Konkuk Univ, Dept Appl Phys, Chungju 308701, South Korea
[5] Konkuk Univ, Dept Appl Chem, Chungju 308701, South Korea
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中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Single-walled carbon nanotubes (SW-NTs) and multi-walled carbon nanotubes (MWNTs) were synthesized on silicon substrate by the control of catalyst size, hydrocarbon species, and carbon flux through chemical vapor deposition (CVD). Catalysts for SWNTs. and MWNTs could be obtained by an agglomeration of sputtered Co-Mo and pure Co thin films, respectively. The addition of Mo in the Co catalyst provides an effective nucleation site for SWNT and the low carbon flux by using methane gas in CVD reaction makes it possible to grow a single-walled structure. (C) 2002 Elsevier Science B.V. All rights reserved.
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页码:109 / 114
页数:6
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