Modeling and optimization of the synthesis of fine-particle powders in high-frequency plasma

被引：0

作者：

Timoshenkov, SP ^{[1
]}

Prokop'ev, EP ^{[1
]}

D'yachkov, SA ^{[1
]}

机构：

[1] Technol Univ, Moscow Inst Elect Engn, Moscow 103498, Russia

来源：

THEORETICAL FOUNDATIONS OF CHEMICAL ENGINEERING | 2002年 / 36卷 / 05期

关键词：

Oxide; Oxygen; Silicon; SiO2; Heat Treatment;

D O I：

10.1023/A:1020638215187

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

The synthesis of SiO2, Al2O3, BaO, PbO, B2O3, ZnO, and SiO2-Al2O3-BaO fine-particle powders was studied experimentally and optimized. The metal oxides, silicon, and an SiO2-Al2O3-BaO mixture were treated in an argon-oxygen or air high-frequency induction plasma, whereupon amorphous layers were deposited onto silicon substrates. Heat treatment of these layers at 1473 K for 15 min yielded continuous amorphous dielectric films with desired properties.

引用

页码：500 / 504

页数：5

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