Low temperature plasma RF capacitive discharge in helium at atmospheric pressure

被引：3
|
作者：
Hakki, A. [1 ]
Fayrushin, I. [1 ]
Kashapov, N. [1 ]
机构：
[1] Kazan Fed Univ, KremlyovskayaSt,Bdg 18, Kazan 420008, Russia
来源：
VII CONFERENCE ON LOW TEMPERATURE PLASMA IN THE PROCESSES OF FUNCTIONAL COATING PREPARATION | 2016年 / 669卷
关键词：
Low temperature plasma; RF capacitive discharge; atmospheric pressure;
D O I：
10.1088/1742-6596/669/1/012022
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
The paper describes Low temperature plasma RF capacitive discharge in helium at atmospheric pressure. The circuit has been done, to obtain output currentabout 90mA, and the maximum power was 100W, The frequency of the discharging was f=40MHz. Twolamps (Gamma y-50) were used in power supply. Helium consumption was about 1.5l/m.
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页数：6
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