Surface properties and microstructure of implanted TiN films using MEVVA ion source

被引：23

作者：

Yang, J. H. ^{[1
]}

Cheng, M. F.

Luo, X. D.

Zhang, T. H.

机构：

[1] Nantong Univ, Sch Sci, Jiangsu 226007, Peoples R China

[2] Beijing Normal Univ, Radiat Beam & Mat Engn Lab, Beijing 100875, Peoples R China

来源：

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 2007年 / 445卷 / 558-562期

关键词：

TiN; ion implantation; wear resistance; XPS; TEM; TRIDYN;

D O I：

10.1016/j.msea.2006.09.073

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The PVD-TiN film was implanted with titanium and nitrogen ions and the improvement in surface wear resistance was investigated. Ti ion implantation was done using a metal vapor vacuum arc (MEVVA) ion source with an implantation dose of 2 x 10(16) ions/cm(2) and at an extraction voltage of 48 kV. The wear characteristics of the implanted samples were measured and compared with the performance of the unimplanted one by a pin-on-disc apparatus and an optical interference microscope. The structures of the samples were observed by X-ray photoelectron spectroscopy (XPS) and transmission electron microscopy (TEM). A dynamic TRIM called as TRIDYN was used to calculate the concentration depth profiles of implanted ions in TiN to investigate wear resistance mechanisms. The results showed that the improved wear resistance of the TiN film was mainly due to forming of nano-order TiN crystal grains in a thick amorphous layer and the decreased local state number of Ti after Ti ion implantation. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：558 / 562

页数：5

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