Masking technique for coating thickness control on large and strongly curved aspherical optics

被引：27

作者：

Sassolas, B. ^{[1
]}

Flaminio, R. ^{[1
]}

Franc, J. ^{[1
]}

Michel, C. ^{[1
]}

Montorio, J-L ^{[1
]}

Morgado, N. ^{[1
]}

Pinard, L. ^{[1
]}

机构：

[1] Lab Mat Avances, F-69100 Villeurbanne, France

来源：

APPLIED OPTICS | 2009年 / 48卷 / 19期

关键词：

LINEAR VARIABLE FILTERS; THIN-FILMS; UNIFORMITY; CONSTANTS;

D O I：

10.1364/AO.48.003760

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We discuss a method to control the coating thickness deposited onto large and strongly curved optics by ion beam sputtering. The technique uses an original design of the mask used to screen part of the sputtered materials. A first multielement mask is calculated from the measured two-dimensional coating thickness distribution. Then, by means of an iterative process, the final mask is designed. By using such a technique, it has been possible to deposit layers of tantalum pentoxide having a high thickness gradient onto a curved substrate 500 mm in diameter. Residual errors in the coating thickness profile are below 0.7%. (C) 2009 Optical Society of America

引用

页码：3760 / 3765

页数：6

共 6 条

[1] Improving Thickness Uniformity of Mo/Si Multilayers on Curved Spherical Substrates by a Masking Technique
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Yi, Shengzhen
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Xie, Chun
COATINGS, 2019, 9 (12)
[2] A preferential coating technique for fabricating large, high quality optics
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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2010, 616 (2-3): : 110 - 114
[3] INFLUENCE OF STRONGLY CURVED LARGE-BORE SUPERCONDUCTING BENDING MAGNETS ON THE OPTICS OF STORAGE-RINGS
MOSER, HO
DRAGT, AJ
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 24-5 : 877 - 879
[4] INFLUENCE OF STRONGLY CURVED LARGE-BORE SUPERCONDUCTING BENDING MAGNETS ON THE OPTICS OF STORAGE RINGS.
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[5] Compact coating machine for large laser optics with a new thickness-distribution equalization method
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JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2004, 43 (01): : 305 - 306
[6] On the optimization of the PIXE technique for thickness uniformity control of ultra-thin chromium layers deposited onto large surface quartz substrate
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Nsouli, B.
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