Improved computer-generated moire profilometry with flat image calibration

An improved computer-generated moire profilometry (CGMP) with flat image calibration is proposed. In CGMP, the purification of the AC component plays a decisive role. While a composite grating modulated with both the sinusoidal grating and its background light substitutes for the sinusoidal grating itself, the sinusoidal deformed pattern and flat image can be demodulated from the captured pattern. It is found that the sinusoidal deformed pattern and flat image may deviate, which is caused by ambient light. So flat image calibration is conducted to obtain a purer AC component that can effectively suppress the influence of ambient light and ensure the measurement accuracy, even if spectrum aliasing exists. Experimental results show the feasibility and validity of the proposed method. (C) 2021 Optical Society of America