Deep drilling of metals by femtosecond laser pulses

被引：6

作者：

Kamlage, G ^{[1
]}

Chichkov, BN ^{[1
]}

Ostendorf, A ^{[1
]}

Tönshoff, HK ^{[1
]}

机构：

[1] Laser Zentrum Hannover EV, D-30419 Hannover, Germany

来源：

HIGH-POWER LASER ABLATION IV, PTS 1 AND 2 | 2002年 / 4760卷

关键词：

Material processing; femtosecond lasers;

D O I：

10.1117/12.482108

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Fabrication of deep high-quality holes in different materials is required for many industrial applications. In this presentation we provide results of detailed investigations on deep drilling of metals by femtosecond laser pulses. We identify most important parameters which should be fulfilled for the fabrication of high-quality holes and efficient femtosecond laser ablation, discuss the role played by the laser-induced optical breakdown, debris, and laser pulse repetition rate.

引用

页码：394 / 397

页数：4

共 50 条

[1] Deep drilling of metals by femtosecond laser pulses
Kamlage, G
Bauer, T
Ostendorf, A
Chichkov, BN
[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2003, 77 (02): : 307 - 310
[2] Deep drilling of metals by femtosecond laser pulses
G. Kamlage
T. Bauer
A. Ostendorf
B.N. Chichkov
[J]. Applied Physics A, 2003, 77 : 307 - 310
[3] Heat Affected Zone in micro-drilling of metals by femtosecond laser pulses
Le Harzic, R
Huot, N
Audouard, E
Laporte, P
[J]. HIGH-POWER LASER ABLATION IV, PTS 1 AND 2, 2002, 4760 : 973 - 979
[4] Development of a Deep Drilling Process in Metals by means of Ultrashort Laser Pulses
Haasler, Dennis
Gillner, Arnold
[J]. HIGH-POWER LASER MATERIALS PROCESSING: APPLICATIONS, DIAGNOSTICS, AND SYSTEMS XI, 2022, 11994
[5] Colorizing metals with femtosecond laser pulses
Vorobyev, A. Y.
Guoa, Chunlei
[J]. APPLIED PHYSICS LETTERS, 2008, 92 (04)
[6] Ablation of metals with femtosecond laser pulses
Leong, KH
Plew, TY
Maynard, RL
Said, AA
Walker, LA
[J]. 20TH ICALEO 2001, VOLS 92 & 93, CONGRESS PROCEEDINGS, 2001, : 1538 - 1546
[7] Interaction of femtosecond laser pulses with metals
Tsui, YY
Li, C
Fedosejevs, R
Capjack, CE
[J]. APPLICATIONS OF PHOTONIC TECHNOLOGY 4: CLOSING THE GAP BETWEEN THEORY, DEVELOPMENT, AND APPLICATION, 2000, 4087 : 1201 - 1206
[8] Deep drilling of metals with ultrashort laser pulses: A two-stage process
Nielsen, C.S.
Balling, P.
[J]. Journal of Applied Physics, 2006, 99 (09):
[9] Deep drilling of metals with ultrashort laser pulses: A two-stage process
Nielsen, C. S.
Balling, P.
[J]. JOURNAL OF APPLIED PHYSICS, 2006, 99 (09)
[10] Ablation and nanostructuring of metals by femtosecond laser pulses
Ashitkov, S. I.
Komarov, P. S.
Ovchinnikov, A. V.
Struleva, E. V.
Zhakhovskii, V. V.
Inogamov, N. A.
Agranat, M. B.
[J]. QUANTUM ELECTRONICS, 2014, 44 (06) : 535 - 539

← 1 2 3 4 5 →