Low-loss, Low-crosstalk Silicon Nitirde Array Waveguide Grating using Multimode Waveguide at 850nm

被引：0
|
作者：
JaegyuPark [1 ]
GyungockKim [1 ]
Joo, Jiho [1 ]
机构：
[1] Elect & Telecommun Res Inst, Daejeon, South Korea
来源：
2020 IEEE PHOTONICS CONFERENCE (IPC) | 2020年
关键词：
arrayed waveguide grating; silicon nitride;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We investigated silicon nitride(SixNy) arrayed waveguide grating (AWG) with multimode arrayed waveguide at 850nm wavelength to reduce phase error due to the sidewall roughness of the waveguide. The fabricated 8-channel SixNy AWG shows low crosstalk of -30dB and low loss of 0.5dB.
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页数：2
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