High-yield synthesis of conductive carbon nanotube tips for multiprobe scanning tunneling microscope

被引:19
|
作者
Konishi, H.
Murata, Y.
Wongwiriyapan, W.
Kishida, M.
Tomita, K.
Motoyoshi, K.
Honda, S.
Katayama, M.
Yoshimoto, S.
Kubo, K.
Hobara, R.
Matsuda, I.
Hasegawa, S.
Yoshimura, M.
Lee, J. -G.
Mori, H.
机构
[1] Osaka Univ, Grad Sch Engn, Div Elect Elect & Informat Engn, Suita, Osaka 5650871, Japan
[2] Univ Tokyo, Sch Sci, Dept Phys, Bunkyo Ku, Tokyo 1130033, Japan
[3] Toyota Technol Inst, Nano High Tech Res Ctr, Tempaku Ku, Nagoya, Aichi 4688511, Japan
[4] Osaka Univ, Res Ctr Ultra High Voltage Elect Microscopy, Ibaraki, Osaka 5670047, Japan
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 2007年 / 78卷 / 01期
基金
日本科学技术振兴机构; 日本学术振兴会;
关键词
D O I
10.1063/1.2432253
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We have established a fabrication process for conductive carbon nanotube (CNT) tips for multiprobe scanning tunneling microscope (STM) with high yield. This was achieved, first, by attaching a CNT at the apex of a supporting W tip by a dielectrophoresis method, second, by reinforcing the adhesion between the CNT and the W tip by electron beam deposition of hydrocarbon and subsequent heating, and finally by wholly coating it with a thin metal layer by pulsed laser deposition. More than 90% of the CNT tips survived after long-distance transportation in air, indicating the practical durability of the CNT tips. The shape of the CNT tip did not change even after making contact with another metal tip more than 100 times repeatedly, which evidenced its mechanical robustness. We exploited the CNT tips for the electronic transport measurement by a four-terminal method in a multiprobe STM, in which the PtIr-coated CNT portion of the tip exhibited diffusive transport with a low resistivity of 1.8 k Omega/mu m. The contact resistance at the junction between the CNT and the supporting W tip was estimated to be less than 0.7 k Omega. We confirmed that the PtIr thin layer remained at the CNT-W junction portion after excess current passed through, although the PtIr layer was peeled off on the CNT to aggregate into particles, which was likely due to electromigration or a thermally activated diffusion process. These results indicate that the CNT tips fabricated by our recipe possess high reliability and reproducibility sufficient for multiprobe STM measurements. (c) 2007 American Institute of Physics.
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页数:6
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