Evaluation of error in the measurement of displacement vector components by using electronic speckle pattern interferometry

被引：5

作者：

Martinez, Amalia ^{[1
]}

Rayas, J. A. ^{[1
]}

机构：

[1] Ctr Invest Opt, Guanajuato 37000, Mexico

来源：

OPTICS COMMUNICATIONS | 2007年 / 271卷 / 02期

关键词：

optical metrology; in-plane and out-of-plane displacements; ESPI; sensitivity matrix;

D O I：

10.1016/j.optcom.2006.10.046

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report on the errors obtained by comparing in- and out-of-Plane displacements calculated from the sensitivity matrix with all its components, and when only the component from the largest contributing of each one of the three interferometers is considered. Divergent illumination is considered in the evaluation of sensitivity vector to measure displacement vector components. This analysis is performed for a flat elastic target which is loaded in the x-direction and after in the z-direction. The technique applied is electronic speckle pattern interferometry. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：445 / 450

页数：6

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