Depth-dependent evolution of texture and stress in thin films

被引：0
|
作者：
Birkholz, Mario [1 ]
机构：
[1] IHP, D-15236 Frankfurt, Germany
来源：
ACTA CRYSTALLOGRAPHICA A-FOUNDATION AND ADVANCES | 2015年 / 71卷
关键词：
thin film; texture; residual stress; depth gradients; PREFERRED ORIENTATION; DIFFRACTION; GRADIENTS;
D O I：
10.1107/S2053273315097697
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
MS43-O2
引用
收藏
页码：S159 / S159
页数：1
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