Growth behavior of intermetallic compound on bonding joint of Cu wire on Al alloy pad during thermal aging

被引:0
|
作者
Xu Hui [1 ]
Wang Chunqing [1 ]
Hang Chunjin [1 ]
机构
[1] Harbin Inst Technol, Sch Mat Sci & Engn, Harbin 150001, Peoples R China
关键词
copper ball bonding; intermetallics compound (IMC); aging; micro-XRD;
D O I
暂无
中图分类号
TF [冶金工业];
学科分类号
0806 ;
摘要
Copper wire of 50 mu m in diameter was bonded to the Al-1%Si-0.5%Cu pad successfully by thermosonic wire bonding. SEM, EDXS and micro-XRD were adopted to investigate the intermetallic compounds (IMC) at the interface of wire and pad. The results show that the major IMC are CuAl2 and Cu9Al4, Cu-Al IMC growth followed the parabolic law as a function of aging times at certain aging temperatures and the activation energy of Cu-Al IMC growth was 97.1 kJ/mol.
引用
收藏
页码:125 / 130
页数:6
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