A novel magnetic bead-based biosensor using flip chip bonding techniques

被引：0
|
作者：
Wang, Bin [1 ]
Chen, Xiang [1 ]
Jin, Qinghui [1 ]
Zhao, Jianlong [1 ]
Xu, Yuansen [1 ]
机构：
[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China
来源：
RARE METAL MATERIALS AND ENGINEERING | 2006年 / 35卷
关键词：
flip-chip; magnetic; planar coil; PDMS;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Based on flip-chip packaging, a novel approach towards integrated magnetic bio-separator was designed. The magnetic field and the force on the bead were simulated and analyzed, leading to the optimization of the fabrication parameters of the micro-magnetic unit. The planar coil as an electromagnet was fabricated through electroplating on a single seed layer. The PDMS microfluidic channel was bonded on the inverse side after Si etching. The results presented in this paper provide a novel design and fabrication to approach a microfluidic bio-separation system with magnetic beads.
引用
收藏
页码：421 / 424
页数：4
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