Identification Model-Based Control System Design for Semiconductor Manufacturing Equipment

In high-speed and high-precision control of a precision stage for semiconductor manufacturing, vibration of the axially moving factors leads to operational problems and limits their utility in many applications. Reaction force and vibration controls are a key to improve the control performance. In the present paper, aiming at a systematic design of the both control systems, the 6-degree of freedom (6DOF) equipment is developed. A precision XY stage is mounted on an active vibration isolator. Two counter weights driven by linear actuators are placed eccentric from the center of gravity, i.e., two weights are not co-axial. With the developed equipment, at first, the multi-input and multi-output (MIMO) modeling based on the subspace method is experimentally investigated. Using the identified MIMO model, the reaction force and vibration control systems as well as the positioning system are systematically designed based on the bilateral control strategy. Finally, the effectiveness of the proposed model-based control approach for the integrated design of the precision stage system is verified by the vibration suppression control experiments.