Design and fabrication of diffractive optical elements for optical tweezer arrays by means of e-beam lithography

被引：27
|
作者：
Cojoc, D
Di Fabrizio, E
Businaro, L
Cabrini, S
Romanato, F
Vaccari, L
Altissimo, M
机构：
[1] Univ Politehn Bucharest, TEF Dept, Optoelect Grp, Bucharest, Romania
[2] Elettra Synchrothron Light Source, TASC INFM Nanolithog Beamline, Natl Nanotechnol Lab, LILIT NNL, I-34012 Trieste, Italy
[3] Elettra Synchrothron Light Source, I-34012 Trieste, Italy
来源：
MICROELECTRONIC ENGINEERING | 2002年 / 61-2卷
关键词：
phase retrieval iterative algorithms; genetic algorithms; 2D and 3D optical tweezer arrays;
D O I：
10.1016/S0167-9317(02)00426-4
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Optical tweezer arrays generated by diffractive optical elements can extend the capabilities to manipulate and organize microscopic particles into complex structures, to sort them intelligently and to study collective behavior in many-body systems materials. We describe new design methods, based on iterative algorithms, to calculate phase-only diffractive optical elements able to generate planar and three-dimensional arrays of tweezers. Experimental results showing the validity of the design approach are presented for an array of eight gaussian spots. (C) 2002 Published by Elsevier Science BY.
引用
收藏
页码：963 / 969
页数：7
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