Homoepitaxial growth and luminescence characterization of GaN epilayer by RF-MBE on MOCVD-grown GaN substrate

被引:0
|
作者
Kurai, S [1 ]
Kubo, S [1 ]
Okazaki, T [1 ]
Manabe, S [1 ]
Sugita, T [1 ]
Kawabe, A [1 ]
Yamada, Y [1 ]
Taguchi, T [1 ]
机构
[1] Yamaguchi Univ, Fac Engn, Dept Elect & Elect Engn, Ube, Yamaguchi 7558611, Japan
关键词
D O I
10.1002/(SICI)1521-396X(199911)176:1<459::AID-PSSA459>3.0.CO;2-Z
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Homoepitaxial growth of GaN on MOCVD-grown GaN/sapphire substrate has been carried out by RF-MBE. The structural and optical properties of the homoepitaxial GaN layers have been investigated by comparing with those of heteroepitaxially-grown GaN by RF-MBE using atomic force microscopy, X-ray diffraction and photoluminescence measurements. From the results, the two-dimensional growth mode was thought to be dominant in homoepitaxial GaN. The A- and B-free exciton emissions are clearly observed in the temperature dependence of photoluminescence and reflectance spectra of the RF-MBE-grown homoepitaxial GaN.
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页码:459 / 463
页数:5
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