Atmospheric pressure plasma-assisted femtosecond laser engraving of aluminium

被引:2
|
作者
Gerhard, Christoph [1 ]
Gimpel, Thomas [2 ]
Tasche, Daniel [3 ]
Hoffmeister, Jennifer Koch Nee [3 ]
Brueckner, Stephan [3 ,4 ]
Flachenecker, Guenter [5 ]
Wieneke, Stephan [3 ]
Schade, Wolfgang [5 ]
Vioel, Wolfgang [3 ,4 ]
机构
[1] Tech Univ Appl Sci Wildau, Fac Engn & Nat Sci, Hsch Ring 1, D-15745 Wildau, Germany
[2] Tech Univ Clausthal, Res Ctr Energy Storage Technol, Stollen 19A, D-38640 Goslar, Germany
[3] Univ Appl Sci & Arts, Fac Nat Sci & Technol, Von Ossietzky Str 99, D-37085 Gottingen, Germany
[4] Fraunhofer Inst Surface Engn & Thin Films, Applicat Ctr Plasma & Photon, Von Ossietzky Str 100, D-37085 Gottingen, Germany
[5] Fraunhofer Heinrich Hertz Inst, Energie Campus,Stollen 19H, D-38640 Goslar, Germany
关键词
atmospheric pressure plasma; laser-plasma-processing; femtosecond laser machining; dielectric barrier discharge; micro structuring; aluminium; FUSED-SILICA; ABLATION; ARGON; GENERATION; ABSORPTION;
D O I
10.1088/1361-6463/aab6e6
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this contribution, we report on the impact of direct dielectric barrier discharge argon plasma at atmospheric pressure on femtosecond laser engraving of aluminium. It is shown that the assisting plasma strongly affects the surface geometry and formation of spikes of both laser-engraved single lines and patterns of adjacent lines with an appropriate overlap. Further, it was observed that the overall ablation depth is significantly increased in case of large-scale patterning whereas no notable differences in ablation depth are found for single lines. Several possible mechanisms and underlying effects of this behaviour are suggested. The increase in ablation depth is supposed to be due to a plasma-induced removal of debris particles from the cutting point via charging and oxidation as supported by EDX analysis of the re-solidified debris. Furthermore, the impact of a higher degree of surface wrinkling as well as direct interactions of plasma species with the aluminium surface on the ablation process are discussed.
引用
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页数:8
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