High resolution magnetic force microscopy using focused ion beam modified tips

被引:67
|
作者
Phillips, GN [1 ]
Siekman, M [1 ]
Abelmann, L [1 ]
Lodder, JC [1 ]
机构
[1] Univ Twente, MESA Res Inst, Syst & Mat Informat Storage Grp, NL-7500 AE Enschede, Netherlands
关键词
D O I
10.1063/1.1497434
中图分类号
O59 [应用物理学];
学科分类号
摘要
Atomic force microscope tips coated by the thermal evaporation of a magnetic 30 nm thick Co film have been modified by focused ion beam milling with Ga+ ions to produce tips suitable for magnetic force microscopy. Such tips possess a planar magnetic element with high magnetic shape anisotropy, an extremely high aspect ratio of greater than 30:1, and an end radius of less than 25 nm. These tips have been used in a commercial atomic force microscope under ambient conditions to obtain 30 nm resolution magnetic images of an established CoNi/Pt multilayer reference sample. (C) 2002 American Institute of Physics.
引用
收藏
页码:865 / 867
页数:3
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