Application of Inkjet 3D Printing in MEMS Technique

被引：0
|
作者：
Walczak, Rafal [1 ]
机构：
[1] Wroclaw Univ Sci & Technol, Fac Microsyst Elect & Photon, Wroclaw, Poland
来源：
PROCEEDINGS OF THE 25TH INTERNATIONAL CONFERENCE MIXED DESIGN OF INTEGRATED CIRCUITS AND SYSTEM (MIXDES 2018) | 2018年
关键词：
3D printing; MEMS; FLUORESCENCE DETECTION; ON-CHIP;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, a discussion on applicability of inkjet 3D printing for MEMS fabrication is presented on the base of works carried out by the team leaded by the author. Some remarks on novel technique - 4D printing - are also presented as an emerging technique towards next generation MEMS development.
引用
收藏
页码：121 / 124
页数：4
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