Technique for thermal isolation of antenna-coupled infrared microbolometers

被引：28
|
作者：
Middleton, C. F. [1 ]
Boreman, G. D. [1 ]
机构：
[1] Univ Cent Florida, CREOL, Coll Opt & Photon, Orlando, FL 32816 USA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2006年 / 24卷 / 05期
关键词：
D O I：
10.1116/1.2335434
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A new method was developed to thermally isolate monolithic antenna-coupled infrared microbolometers from their substrate. Using a SiO2 sacrificial layer to create a 400 mn thick Si3N4 membrane, square spiral antennas coupled to Ni microbolometers were fabricated and tested. The responsivity of the thermally isolated devices is 164 times greater than a similar device that is not fabricated on a membrane. (c) 2006 American Vacuum Society.
引用
收藏
页码：2356 / 2359
页数：4
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