Determination of plasma parameters from thermal probe data

被引：6
|
作者：
Matsuura, H. [1 ]
Jida, T. [1 ]
机构：
[1] Osaka Prefecture Univ, Grad Sch Engn, Sakai, Osaka 5998531, Japan
来源：
CONTRIBUTIONS TO PLASMA PHYSICS | 2006年 / 46卷 / 5-6期
关键词：
thermal probe; electron temperature; heat flux; sheath;
D O I：
10.1002/ctpp.200610022
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
Thermal probe method uses heat flux data as the function of probe bias voltage. These data contain not only electron information but also ion one. In this paper, we applied a thermal probe to DC-glow discharge plasma and test it to deduce electron and ion temperature. Obtained temperatures are in qualitative agreement with theoretical prediction, but the accuracy of heat flux measurement must be largely improved. (C) 2006 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码：406 / 410
页数：5
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