Two-color interferometer for surface characterization using two frequency doublers and a four-phase-step method

被引：3
|
作者：
Matsumoto, H [1 ]
Zeng, LJ [1 ]
机构：
[1] RES DEV CORP JAPAN,KAWACHI MILLIBIOFLIGHT PROJECT,PILOT LAB,TSUKUBA,IBARAKI 30026,JAPAN
来源：
APPLIED OPTICS | 1996年 / 35卷 / 13期
关键词：
common-path interferometer; surface measurement; phase-shifting interferometer;
D O I：
10.1364/AO.35.002179
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A high-accuracy, two-color interferometer for characterizing a processed surface is described. It is composed of two frequency doublers. It is not affected by air turbulence and mechanical vibration because it is a complete common-path interferometer, and the effects from different reflectivities of various materials are canceled by a four phase-step technique that shifts the phase of the interference fringe in steps of pi/2. The processed surface is measured with subnanometer resolution. (C) 1996 Optical Society of America
引用
收藏
页码：2179 / 2181
页数：3
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