Engineering Nanomaterials and Nanostructures for Electronic Applications: A Case Study of Carbon Nanotubes for Memory Devices

被引：6

作者：

Sen, Rahul ^{[1
]}

Kocab, Thomas ^{[1
]}

Black, Jennifer ^{[1
]}

McDermott, Joseph ^{[1
]}

Pal, Sushanta K. ^{[1
]}

Buffat, Steve ^{[1
]}

Gilmer, David C. ^{[1
]}

Rueckes, Thomas ^{[1
]}

机构：

[1] Nantero Inc, Woburn, MA 01801 USA

来源：

2020 IEEE ELECTRON DEVICES TECHNOLOGY AND MANUFACTURING CONFERENCE (EDTM 2020) | 2020年

关键词：

nanotechnology; carbon nanotubes; memory devices;

D O I：

10.1109/edtm47692.2020.9117911

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A ultra-high purity carbon nanotube formulation and film is described. This material system has been successfully integrated into a semiconductor fabrication process for electronic device applications. Key challenges that were resolved to successfully implement this new material system into the semiconductor process are described.

引用

页数：4

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