Dual-wavelength Fourier ptychography using a single LED

被引：13

作者：

Choi, Guk-Jong ^{[1
]}

Lim, Jinsang ^{[2
]}

Jeon, Sungbin ^{[1
]}

Cho, Janghyun ^{[2
]}

Lim, Geon ^{[1
]}

Park, No-Cheol ^{[1
]}

Park, Young-Pil ^{[1
]}

机构：

[1] Yonsei Univ, Dept Mech Engn, 50 Yonsei Ro, Seoul 03722, South Korea

[2] Yonsei Univ, Ctr Informat Storage Device, 50 Yonsei Ro, Seoul 03722, South Korea

来源：

OPTICS LETTERS | 2018年 / 43卷 / 15期

基金：

新加坡国家研究基金会;

关键词：

PHASE UNWRAPPING ALGORITHM; MICROSCOPY; ILLUMINATION; HOLOGRAPHY; RECOVERY; ARRAY; FIELD;

D O I：

10.1364/OL.43.003526

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We propose dual-wavelength Fourier ptychography for topographic measurement. To extend the axial measurement range, a single light-emitting diode (LED) and two appropriate bandpass filters are employed. This provides a spedde-free phase image, and reduces the possibility of a systematic error, which yields a high-quality topographic image. The proposed system can measure the surface topography in the range of nano- to micro-structures. The performance of the system is experimentally verified. (C) 2018 Optical Society of America

引用

页码：3526 / 3529

页数：4

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