TUNING FREQUENCY STABILITY IN MICROMECHANICAL RESONATORS WITH PARAMETRIC PUMPING

被引：3
|
作者：
Bousse, Nicholas E. [1 ]
Miller, James M. L. [1 ,2 ]
Vukasin, Gabrielle D. [1 ]
Kwon, Hyun-Keun [1 ]
Shaw, Steven W. [2 ]
Kenny, Thomas W. [1 ]
机构：
[1] Stanford Univ, Stanford, CA 94305 USA
[2] Florida Inst Technol, Melbourne, FL 32901 USA
来源：
2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS) | 2022年
基金：
美国国家科学基金会;
关键词：
frequency stability; quality factor; effective quality factor; parametric pumping; microcantilever;
D O I：
10.1109/MEMS51670.2022.9699669
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this work we experimentally investigate the influence of parametric amplification and parametric suppression on the frequency stability of micromechanical resonators. We isolate the influence of phase slope tuning from changes in the vibrational amplitude and find that parametric suppression improves the frequency stability in the thermal noise regime by over threefold, while parametric amplification degrades the frequency stability by nearly a factor of two.
引用
收藏
页码：987 / 990
页数：4
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