A noncontact wireless passive radio frequency (RF) resonant pressure sensor with optimized design for applications in high-temperature environments

被引:16
|
作者
Li, Chen [1 ,2 ]
Tan, Qiulin [1 ,2 ]
Xiong, Jijun [1 ,2 ]
Jia, Pinggang [1 ,2 ]
Hong, Yingping [1 ,2 ]
Ren, Zhong [1 ,2 ]
Luo, Tao [1 ,2 ]
Liu, Jun [1 ,2 ]
Xue, Chenyang [1 ,2 ]
Zhang, Wendong [1 ,2 ]
机构
[1] North Univ China, Sci & Technol Elect Test & Measurement Lab, Taiyuan 030051, Peoples R China
[2] North Univ China, Minist Educ, Key Lab Instrumentat Sci & Dynam Measurement, Taiyuan 030051, Peoples R China
基金
中国国家自然科学基金;
关键词
wireless passive pressure sensor; high-temperature ceramic sensor; high temperature characterization; pressure measurement;
D O I
10.1088/0957-0233/25/7/075101
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A noncontact wireless passive pressure sensor based on alumina ceramic for pressure measurement is presented in this paper. A faithful pressure signal in harsh environment is captured through wireless sensing, and a novel antenna design method is developed to increase the measurement distance between the antenna and the sensor. The sensor is fabricated using a novel no-co-fired technology, and the properties of the alumina ceramic and platinum ensure the feasibility of the sensor in high-temperature environments. The experimental results show that the coupled distance between the antenna and the sensor can be up to 5.5 cm, and the designed sensor, featuring improved structural parameters, has a high responsivity (15.5 kHz kPa(-1)) in a pressure environment at room temperature. The sensor can be coupled with the antenna at 850 degrees C, which verifies the feasibility in high-temperature environments.
引用
收藏
页数:10
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