Design and simulation of a piezoresistive MEMS pressure sensor for marine applications

This paper reports on the design and simulation results of a silicon bulk-micromachined diaphragm-type piezoresistive pressure sensor capable of operating linearly over a wide dynamic range (0-1000 meters of water). The piezoresistor elements of the sensor are arranged in a wheatstone bridge configuration to achieve a higher output response. Simulation results (output voltage and sensitivity analysis) obtained using coupled MemPZR-MemMech module of the CoventorWare2003 Finite Element tool are presented. The effect of diaphragm size, diaphragm thickness and thickness of the piezos on output sensitivity were analyzed and optimized to get a linear response over the wide dynamic range.