The characteristic analysis of a piezoelectric actuator for valveless micropumps

被引：0
|
作者：
Lee, Sung-Hyuk [1 ]
Heo, Seok [1 ]
Kim, Cheol-Woong [1 ]
Yoon, Kwang-Joon [1 ]
机构：
[1] Konkuk Univ, Artificial Muscle Res Ctr, Seoul 143701, South Korea
来源：
Experimental Mechanics in Nano and Biotechnology, Pts 1 and 2 | 2006年 / 326-328卷
关键词：
piezoelectric actuator; volumetric micropump; theoretical analysis;
D O I：
10.4028/www.scientific.net/KEM.326-328.1511
中图分类号：
Q81 [生物工程学（生物技术）]; Q93 [微生物学];
学科分类号：
071005 ; 0836 ; 090102 ; 100705 ;
摘要：
The behavior of a circular piezoelectric actuator for volumetric micropump has been investigated by using theoretical and finite element analyses. A modified theoretical model was developed to predict the behavior of a piezoelectric actuator induced by the applied voltage. The theoretical results for the diaphragm deflection were in good agreement with the results from numerical simulation. Based on the theoretical analysis, the effects of several important parameters on actuation performance have been investigated. These parameters include the dimensions and mechanical properties of the piezoelectric disk, bonding layer and elastic diaphragm materials. Consequently, it is thought that above theoretical model might be employed as a tool for design and optimization of the piezoelectric actuator for micropump application.
引用
收藏
页码：1511 / 1514
页数：4
相关论文
共 50 条
  • [1] Modeling and numerical analysis of a circular piezoelectric actuator for valveless micropumps
    Cui, Qifeng
    Liu, Chengliang
    Zha, Xuan F.
    [J]. JOURNAL OF INTELLIGENT MATERIAL SYSTEMS AND STRUCTURES, 2008, 19 (10) : 1195 - 1205
  • [2] Analytical analysis of a circular PZT actuator for valveless micropumps
    Li, SF
    Chen, SC
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 2003, 104 (02) : 151 - 161
  • [3] DYNAMIC ANALYSIS OF PIEZOELECTRIC VALVELESS MICROPUMPS: EFFECTS OF PIEZOELECTRIC TRANSDUCER MATERIAL
    Sayar, Ersin
    Farouk, Bakhtier
    [J]. PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2013, VOL 10, 2014,
  • [4] Analysis of a bilaminar circular piezoelectric actuator for micropumps
    Johari, Juliana
    Majlis, Burhanuddin Yeop
    [J]. 2006 IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS, PROCEEDINGS, 2006, : 106 - +
  • [5] Valveless micropumps with one or two piezoelectric buzzers
    Hong, ZH
    Hwang, SF
    [J]. PROGRESS ON ADVANCED MANUFACTURE FOR MICRO/NANO TECHNOLOGY 2005, PT 1 AND 2, 2006, 505-507 : 427 - 432
  • [6] Research and verification of similar laws in valveless piezoelectric micropumps
    He, Xiuhua
    Shan, Chunming
    Yang, Hang
    [J]. MICRO & NANO LETTERS, 2021, 16 (05) : 281 - 289
  • [7] Performance of valveless diffuser micropumps under harmonic piezoelectric actuation
    Ahmadian, M. T.
    Saidi, M. H.
    Mehrabian, Amin
    Bazargan, M.
    Kenarsari, S. D.
    [J]. Proceedings of the 8th Biennial Conference on Engineering Systems Design and Analysis, Vol 2, 2006, : 693 - 699
  • [8] Analysis of valveless micropumps with inertial effects
    Pan, LS
    Ng, TY
    Wu, XH
    Lee, HP
    [J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2003, 13 (03) : 390 - 399
  • [9] Modeling of Valveless Micropumps
    Tsui, Yeng-Yung
    Wu, Shin-En
    [J]. NUMERICAL HEAT TRANSFER PART A-APPLICATIONS, 2009, 56 (09) : 727 - 745
  • [10] The analysis of internal transient flow and the performance of valveless piezoelectric micropumps with planar diffuser/nozzles elements
    Xiuhua He
    Jiawei Zhu
    Xitong Zhang
    Liang Xu
    Song Yang
    [J]. Microsystem Technologies, 2017, 23 : 23 - 37
12345