Formation of Nanoporous Oxide at Aluminum Anodizing

被引:2
|
作者
Shcherbakov, A. I. [1 ]
Skvortsova, I. B. [1 ]
Zolotarevskii, V. I. [1 ]
Chernova, G. P. [1 ]
Mashchenko, V. E. [1 ]
机构
[1] Russian Acad Sci, Frumkin Inst Phys Chem & Electrochem, Moscow 119991, Russia
关键词
FABRICATION; ARRAYS; SUBSTRATE; TEMPLATE;
D O I
10.1134/S2070205109010109
中图分类号
TF [冶金工业];
学科分类号
0806 ;
摘要
The effect of electrochemical anodic oxidation on the formation of porous anodic oxide films (PAOF) on a high-grade aluminum (99.99%) in a sulfuric acid solution is studied. Anodizing modes are chosen such as to obtain PAOF with ordered nanostructure. It is shown that under an atomic force microscope, the anodic film reveals a cellular structure. The parameters of the latter are as follows: diameters of a pore (30 35 nm) and a circle circumscribed around a hexahedral cell (90 nm). A possible mechanism of the formation of regular nanoporous structures of anodic aluminum oxide is proposed.
引用
收藏
页码:67 / 70
页数:4
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