Determination of trace elemental inpurities in high purity trimethylgallium by inductively coupled plasma-atomic emission spectrometry

被引：0

作者：

Yu, L

Lü, BY

Qiu, LW

Sun, XZ ^{[1
]}

Fang, HQ

机构：

[1] Nanjing Univ, Dept Chem, Nanjing 210093, Peoples R China

[2] Nanjing Inst Geol & Mineral Resources, Nanjing 210016, Peoples R China

[3] Nanjing Univ, State Key Lab Mineral Deposit Res, Nanjing 210093, Peoples R China

来源：

CHINESE JOURNAL OF ANALYTICAL CHEMISTRY | 2000年 / 28卷 / 01期

关键词：

inductively coupled plasma-atomic emission spectrometry; trimethylgallium; impurities;

D O I：

暂无

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A method of determining Cu, Fe, Si, Zn etc. 31 trace elemental impurities in high purity Ga (CH3)(3) by inductively coupled plasma-atomic emission spectrometry is reported. The spectral and non-spectral interference of gallium matrix, the effect of the matrix concentration to the signal-to-noise ratio and the detection limits of the determined elements were investigated. The optimum working conditions, the analytical spectral lines and matrix concentration were examined. And we also studied the decomposition of the trimethylgallium.

引用

页码：42 / 45

页数：4