3-D MICRO-FABRICATION AND SEPARATION OF PDMS BY ULTRA-SHORT PULSED LASER

被引：0
|
作者：
Huang, Huan [1 ]
Guo, Zhixiong [1 ]
机构：
[1] Rutgers State Univ, Dept Mech & Aerosp Engn, Piscataway, NJ 08854 USA
来源：
IMECE 2008: HEAT TRANSFER, FLUID FLOWS, AND THERMAL SYSTEMS, VOL 10, PTS A-C | 2009年
关键词：
FEMTOSECOND LASER; BREAKDOWN; POLYMERS; MICROFABRICATION; ABLATION; SURFACE; GLASS;
D O I：
暂无
中图分类号：
O414.1 [热力学];
学科分类号：
摘要：
In this paper, micro-fabrication of bio-degradable polymer-PDMS via an ultra-short pulsed (USP) laser is reported for potential applications in biomaterial, biomedicine, and tissue engineering. Thin layer PDMS separation has been presented with a minimum of about 20 pin thickness and a 3-dimensional PDMS micro-channel network has also been shown. The surface condition and thickness of the separated PDMS layer are examined using SEM and surface profilometre. This work on using USP laser for separation of bio-degradable polymer is the first of its kind, and it shows great potential biomedical application for tissue microprocessing and separation.
引用
收藏
页码：1273 / 1278
页数：6
相关论文
共 50 条
  • [1] Ultra-short pulsed laser PDMS thin-layer separation and micro-fabrication
    Huang, Huan
    Guo, Zhixiong
    [J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2009, 19 (05)
  • [2] ABLATION AND SEPARATION OF DERMIS VIA ULTRA-SHORT PULSED LASER
    Huang, Huan
    Guo, Zhixiong
    [J]. IMECE2009: PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, VOL 2, 2010, : 129 - 137
  • [3] Micro-fabrication on 3-D Surface by Electrostatic Induced Lithography
    Yu, W.
    Cargill, S.
    Leonard, M.
    Desmulliez, M. P. Y.
    [J]. ESTC 2008: 2ND ELECTRONICS SYSTEM-INTEGRATION TECHNOLOGY CONFERENCE, VOLS 1 AND 2, PROCEEDINGS, 2008, : 111 - 116
  • [4] Geometry assessment of ultra-short pulsed laser drilled micro-holes
    Matthias Putzer
    Norbert Ackerl
    Konrad Wegener
    [J]. The International Journal of Advanced Manufacturing Technology, 2021, 117 : 2445 - 2452
  • [5] Ultra-short pulsed laser microstructuring of diamond
    Shirk, M
    Molian, P
    Wang, C
    Ho, K
    Malshe, A
    [J]. 1ST INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION, 2000, 4088 : 98 - 101
  • [6] Ultra-short pulsed laser ablation of polymers
    Serafetinides, AA
    Makropoulou, MI
    Skordoulis, CD
    Kar, AK
    [J]. APPLIED SURFACE SCIENCE, 2001, 180 (1-2) : 42 - 56
  • [7] Studies on ultra-short laser micro structuring
    Zergioti, I
    Papazoglou, DG
    Gamaly, E
    Rode, A
    Fotakis, C
    [J]. ADVANCED OPTICAL PROCESSING OF MATERIALS, 2003, 780 : 143 - 148
  • [8] Ultra-short pulsed laser deposition and patterning of SiC thin films for MEMS fabrication
    Vendan, Monica
    Molian, Pal
    Bastawros, Ashraf
    Anderegg, James
    [J]. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2005, 8 (06) : 630 - 645
  • [9] Human dermis separation via ultra-short pulsed laser plasma-mediated ablation
    Huang, Huan
    Guo, Zhixiong
    [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2009, 42 (16)
  • [10] Ultra-Short Pulsed Laser Manufacturing and Surface Processing of Microdevices
    Yu, Yongchao
    Bai, Shi
    Wang, Shutong
    Hu, Anming
    [J]. ENGINEERING, 2018, 4 (06) : 779 - 786
12345