Sensing platform based on micro-ring resonator and on-chip reference sensors in SOI

被引:4
|
作者
Abdulla, S. M. C. [1 ]
de Boer, B. M. [1 ]
Pozo, J. M. [1 ]
van den Berg, J. H. [1 ]
Abutan, A. [1 ]
Hagen, R. A. J. [1 ]
Lo Cascio, D. M. R. [1 ]
Harmsma, P. J. [1 ]
机构
[1] TNO, NL-2628 CK Delft, Netherlands
来源
SILICON PHOTONICS IX | 2014年 / 8990卷
关键词
Micro ring resonators; biosensing on chip; free space coupling; SU8; temperature compensation;
D O I
10.1117/12.2039896
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This article presents work on a Silicon-On-Insulator (SOI) compact sensing platform based on Micro Ring Resonators (MRRs). In order to enable correction for variations in environmental conditions (temperature, mechanical stress etc), a study has been performed on the performance of uncoated sensing MRRs, and of SU8- and SiO2-covered reference MRRs. Excellent shielding for both cover materials has been obtained, however, water permeation into the SU8 causes a slow drift in sensor response. We believe that a user-friendly, low-cost and robust way for optical interfacing to MRR sensor chips is required for practical application in Point-Of-Care diagnostics, and that the cost and complexity of optical-electrical read-out systems must decrease. We have taken first steps to realize that vision, by building a prototype free-space optical coupling set-up, which enables non-photonic experts to characterize surface activation processes using MRRs. Moreover, we present our first steps towards on-chip read-out systems.
引用
收藏
页数:6
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