Combined effects of hydrogen annealing on morphological, electrical and structural properties of graphene/r-sapphire

被引:17
|
作者
Ning, Jing [1 ]
Wang, Dong [1 ]
Yan, Jingdong [1 ]
Han, Dang [1 ]
Chai, Zheng [1 ]
Cai, Weiwei [2 ]
Zhang, Jincheng [1 ]
Hao, Yue [1 ]
机构
[1] Xidian Univ, State Key Discipline Lab Wide Band Gap Semicond T, Xian 710071, Peoples R China
[2] Xiamen Univ, Dept Phys, Lab Nanoscale Condense Matter Phys, Xiamen 361005, Peoples R China
关键词
FILMS; TRANSISTORS;
D O I
10.1016/j.carbon.2014.03.062
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We proposed a comprehensive study on the combined effects of hydrogen thermal annealing process on the morphological, structural and electrical properties of graphene transferred on r-plane sapphire (1-102). We found that although thermal annealing can remove the polymeric residues, unintentional p-type doping of polymeric residues and structural breakages arise simultaneously with the in-plane tensile strain. Also, the forming mechanism of cracks and p-type doping effect were investigated through Raman spectroscopy, atomic force microscopy, non-contact Hall and high resolution X-ray photo-electron spectroscopy. It revealed thermal annealing process has a combined influence on the performance of the hydrogen annealed samples with a critical point, which was similar to 250 degrees C in this work. When the annealing temperature was over the critical point, significant p-type doping effects were included in a dominant position because of graphene with in-plane strain. The results can be important for the fabrication or chemical processing of graphene-based materials and devices. (C) 2014 Elsevier Ltd. All rights reserved.
引用
收藏
页码:262 / 270
页数:9
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