Micromachined ultrasonic Silicon/PZT transducer for underwater communications

被引：0
|
作者：
Siwapornsathain, E [1 ]
Lal, A [1 ]
机构：
[1] Univ Wisconsin, Dept Elect & Comp Engn, SonicMEMS Lab, Madison, WI 53706 USA
来源：
2001 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2 | 2001年
关键词：
D O I：
暂无
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
This paper presents design and experimental results on a miniature micromachined silicon sensor platform that includes an ultrasonic transmitter powered by miniature batteries. The transmitter consists of a Pierce oscillator formed with a Silicon/PZT laminate transducer as the mechanical oscillator. FSK (frequency-shift-keying) transmission of digital data is accomplished by inductive switching in the Pierce oscillator. The device architecture allows for further miniaturization of underwater sensor systems..
引用
收藏
页码：945 / 948
页数：4
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