The application of focused ion beam microscopy in the material sciences

被引：155
|
作者：
Munroe, P. R. [1 ]
机构：
[1] Univ New S Wales, Sch Mat Sci & Engn, Sydney, NSW 2052, Australia
来源：
MATERIALS CHARACTERIZATION | 2009年 / 60卷 / 01期
基金：
澳大利亚研究理事会;
关键词：
SPECIMENS; 3D; DAMAGE;
D O I：
10.1016/j.matchar.2008.11.014
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This paper describes the application of focused ion beam microscopy in the characterisation of materials. The paper is of a tutorial nature whose aim is to assist the novice user in acquiring high quality, artefact-free data. The design of FIBs is described, together with a brief background on the interactions which occur between the incident ion beam and the specimen. The use of focused ion beam microscopy in a wide range of materials science applications, including specimen preparation methods and in the generation of 3D visualisation is described. Crown Copyright (C) 2008 Published by Elsevier Inc. All rights reserved.
引用
收藏
页码：2 / 13
页数：12
相关论文
共 50 条
  • [1] Application of focused ion beam microscopy to planetary and space sciences
    Graham, GA
    Bradley, JP
    Teslich, N
    Dai, ZR
    [J]. SCANNING, 2006, 28 (02) : 66 - 67
  • [2] Focused Ion Beam Microscopy and Micromachining
    C. A. Volkert
    A. M. Minor
    [J]. MRS Bulletin, 2007, 32 : 389 - 399
  • [3] Focused ion beam microscopy and micromachining
    Volkert, C. A.
    Minor, A. M.
    [J]. MRS BULLETIN, 2007, 32 (05) : 389 - 395
  • [4] Application of focused ion beam (FIB) microscopy to the study of crack profiles
    Wang, YZ
    Revie, RW
    Phaneuf, MW
    Li, J
    [J]. FATIGUE & FRACTURE OF ENGINEERING MATERIALS & STRUCTURES, 1999, 22 (03) : 251 - 256
  • [5] Application of a focused ion beam to prepare electron microscopy samples of surface nanostructures
    Volkov, R. L.
    Borgardt, N. I.
    Kukin, V. N.
    Prikhod'ko, A. S.
    Basaev, A. S.
    Shaman, Yu. P.
    [J]. JOURNAL OF SURFACE INVESTIGATION, 2011, 5 (05): : 900 - 904
  • [6] Application of a focused ion beam to prepare electron microscopy samples of surface nanostructures
    R. L. Volkov
    N. I. Borgardt
    V. N. Kukin
    A. S. Prikhod’ko
    A. S. Basaev
    Yu. P. Shaman
    [J]. Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, 2011, 5 : 900 - 904
  • [7] Simulation of material sputtering with a focused ion beam
    N. I. Borgardt
    R. L. Volkov
    A. V. Rumyantsev
    Yu. A. Chaplygin
    [J]. Technical Physics Letters, 2015, 41 : 610 - 613
  • [8] Simulation of material sputtering with a focused ion beam
    Borgardt, N. I.
    Volkov, R. L.
    Rumyantsev, A. V.
    Chaplygin, Yu. A.
    [J]. TECHNICAL PHYSICS LETTERS, 2015, 41 (06) : 610 - 613
  • [9] Applications of focused ion beam in material science
    Repetto, Luca
    Firpo, Giuseppe
    Valbusa, Ugo
    [J]. MATERIALI IN TEHNOLOGIJE, 2008, 42 (04): : 143 - 149
  • [10] Focused ion beam for microscopy and in situ sample preparation:: application on a crustacean digestive system
    Drobne, D
    Milani, M
    Ballerini, M
    Zrimec, A
    Berden Zrimec, M
    Tatti, F
    Draslar, K
    [J]. JOURNAL OF BIOMEDICAL OPTICS, 2004, 9 (06) : 1238 - 1243
12345